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DISS 5 3D imaging

An extension module for our active image scanning system DISS 5. Learn more:

3D imaging Product sheet (size: 190 KB)

Fundamentals of 3D reconstruction

In conventional scanning electron microscopes the image acquisition produces a projection of sample surface in two-dimensional planar geometry.

Mostly it is not possible to measure or calculate forthree-dimensional objects any distances, height levels, areas and volumina from SEM images. In order to get information on 3D-structure of sample surface so-called stereo images must be created by applying sample stage tilting.

DISS 5 3D enables fully automated calculation of stereo images. The method based on data obtained by simultaneous acquisition of four single frames generated from separate signals of a specially designed back-scatter-electron detector (BSD). This procedure avoids additional manipulation of the sample stage. Simultaneously a 3D-model is calculated and visualized.

The calculation of a 3D-model from BSD images is realized for the first time, by using advanced algorithms of image processing developed by ALICONA.

www.alicona.at

Necessary single components

Components Description
Detector system
  • four-sector semiconductor detector with integrated pre-amplifier
  • mounting directly below objective lens of the SEM
  • six-fold electrical through-into vacuum chamber
  • image amplifier with 3 amplification levels (10×/100×/1000×)
  • enlarged range of beam current dynamics: 10pA … 100nA
DISS 5
  • easy installation at any SEM
  • simultaneous recording of four seperate BSD signals
  • enlarged range of dynamics by utilization of 12 Bit D/A-conversion and oversampling
  • automatic operation of brightness and contrast adjustment
  • for further details see specifications of DISS 5
Software
  • DISS 5 image aquisition and image processing for SEM (see DISS 5)
  • integrated 3D-reconstruction
  • integrated 3D-viewer, anaglyph display
  • MeX software package for 3D-analysis (relief profiles, volumes, areas) (ALICONA)

Image examples

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