Our SEM electronics upgrade to control and use all SEM functions with a computer. Learn more:
The electronics upgrade controls all coils of the electron-optical column, gun power supply and detector systems.
Our concept enables us to quickly adapt the electronics for various electron-optical columns. The flexible concept of hard- and software enables to add modules in a simple way to enhance the system.
All adjustable parameters are saved. For dependencies between parameters (high voltage, magnification, working distance, etc.) formulas are defined, which can be adapted during the installation at the user's site.
| Component |
Specification |
| USB controller |
- DC-isolated USB 2.0 inerface to control computer
- Communication with modules
- Management of cross-system parameters
- Configurable Watchdog
|
| HV-VAC-Controller |
- 8 × 16 Bit DAC uni-/bipolar ±10 V
- Analog outputs for:
- Setting Gun Power Supply (HV, filament and emission curent)
- SE/KL contrast (PMT HV)
- SE/KL/RE brightness (offset preamplifier)
- Grid voltage
- 5 × 10 Bit ADC for Emission, VAC, operating voltages
- 16 digital inputs and 16 digital outputs
- Security link to vacuum system
- Control of state of power supply and high voltage
- Turn-on of power supplies and high voltage
- Emergency turn-off of electronics at malfunction
- Configurable Watchdog
|
| Module for deflection coils |
- 2/4 amplifiers for single/double deflection system
- Magnification: 4-step and 16 Bit fine
- Scan rotation
- ScanShift fine
- Correction tilt, orthogonaly, rotation offset
|
| Module with bipolar power supplies |
- 8 × 16 Bit DAC for current/voltage supplies
- 4 × ±500 mA
- 4 × ±10 V
- Beam shift, tilt coils
- Image shift coils
- Stigmator coils (8-pole)
- Filament imaging, stigmator image
|
| Module for objective lens and condensor lens |
- Unipolar, constant power supply
- Objective lens: 2 × 16 Bit DAC (coarse, fine), max. 6,5 A
- 2 × condensor lens: each with 16 Bit DAC, max. 6,5 A
|
| Image system |
- Max. 16.384 × 16.384 pixels, free image format
- 200 ns Pixelclock
- 4 × 12 Bit D/A converter for analog input signals
- 12 × 16 Bit counter for Mapping
- Simultaneous acquisition of 4 analog and 12 digital input signals
|
| Video amplifier |
- Inputs for up to 8 analog input signals
- Video amplifier for 8 × brightness and contrast
- Control of 2 PMTs with brightness and contrast
|
| Power supplies |
- Analog power supplies ±15 V, +5 V, +12 V
- Switching power supply for high power objective and condensor lenses
- 2 × 0 to 1,5 kV module for PMTs
- 12 kV module for scintillator
- 0 to 400 V grid voltage
|
| SEM Operating panel (optional) |
- 4 encoder with switchable function
- Display of functions and values
|
| Control Software |
The electronic unit is completely controlled via PC with the control software. The control software is compatible with Windows 2000 up to Windows 7. Following functions are realized:
- Start-up of complete system automatically or step by step with last used configuration
- Individual scan layouts andconfigurations can be saved and loaded
- Setting of high voltage, filament current and emission current
- Slow start-up high voltage and filament current
- Electronic fine alignment of beam axis with beam shift and beam tilt
- Independent condenser lens control
- Focusing with objective (coarse and fine)
- Alignment of stigmator
- Adjustment of brightness, contrast and magnification
- Image shift
- Defined working distance for EDX
- Export of parameters (magnification, HV, WD) to image acquisition system
|
| Image acquisition |
- Compatible with Windows 2000 up to Windows 7
- Live image with full screen mode
- Slow scan, mapping
- Max. 16.384 × 16.384 pixels, free image format
- Simultaneous acquisition of all input signals
- Up to 32.000× oversampling for noiseless images
- Line averaging, frame averaging
- Reduced area scan with zoom for easy focusing and astigmatism correction
- Mapping, line scan, point measurement, ROI scan, qualitative and quantitative with EDX/WDX
- Export of line profiles as image or measuring data of line scan and point measurements
- AVI-Function for acquistion of video sequences, with fast motion (optional)
- Channel mixer for live mixing of the image signals with selectable colour classification, Topo/Combo function
- Signal monitor to control image signals, live gamma and gradation curves
- Measurement of distances within live image
- Trigger-inputs and clock-outputs for point, line, image
- Mains synchronization for slow-scan
- Thumbnail bar for acquired images
- Configurable image caption
- Report generator (optional)
- Configurable image acquisition functions for routine actions:
- Scan buttons can be added, configured and labeled
- Signal sources, image resolution and image format
- Oversampling up to 32.000×
- Line averaging up to 50×
- Frame averaging up to 256×
- Gate time for mapping
- Automatic for brightness and contrast
- TWAIN interface to integrate DISS 5 as OEM product
- Acquisition library for creation of individual acquisition software
- Context sensitive online help
|
| Image processing |
- Compatible with Windows 2000 up to Windows 7
- Image browser
- Loading of the following filetypes: TIFF, BMP, JPEG, PNG, GIF
- Saving of images in the following filetypes: TIFF, BMP, JPEG, PNG, GIF
- Saving of image data, calibration, point-, linescan data with the image
- Auto-save function
- Layout functionality to save belonging together images
- Printing of single images or layouts, also with different zoom
- Creation of image sections
- Image rotation
- Measurement functions for distances, angles and radii in image
- Image labelling
- configurable image caption with micron bar and image parameters
- False color representation of images, image-mixing function
- Brightness, contrast, histogram function, configurable matrix filter
- Equidensities representation with area calculation (optional)
- Export of point scan, line scan and measurement data as *.xls, *.html, *.txt (optional)
- Semi-automatic structure measurement (optional)
- Phase analysis (optional)
- Context sensitive online help
|
