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DTSTAMP:20260516T182944Z
SUMMARY:Ultra-Low pA-level noise EBIC and RCI of high impedance samples
DESCRIPTION:Nanoprobing imaging equipment for Electron Beam Absorbed Curren
 t/Resistive Contrast Imaging (EBAC/RCI) and Electron Beam Induced Current 
 (EBIC) is widely used in semiconductor process control and development. As
  device dimensions shrink\, electron beam damage becomes more critical\, r
 equiring lower beam voltages and currents. However\, lower beam currents r
 educe nanoprobing imaging signals and signal-to-noise ratio. This talk pre
 sents a novel pA low-noise level amplifier for RCI and EBIC measurements o
 n high-impedance samples\, achieving a peak-to-peak noise level of 3 pA. I
 ts performance is experimentally compared with a reference amplifier\, hig
 hlighting improved RCI measurement capabilities and new operational limits
 .
URL:https://www.pointelectronic.de/en/company/events/cam-workshop-2026/
DTSTART;TZID=Europe/Berlin:20260520T110000
DTEND;TZID=Europe/Berlin:20260520T120000
LOCATION:Halle (Saale)\, Germany
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