Add-ons/Options
3D calibration standards
Calibration samples, data and software for quantitative topography
Calibration samples
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FIB-SEM deposited 3D structures with reference marks for automated calibration
- A range of sizes for SEM, AFM and optical 3D systems
- 3x pyramids for calibration in X, Y and Z directions
- 1x spherical element for adjustment of 4Q BSE detectors
Calibration data
- Calibrated 3D reference data acquired with a metrological SPM system
- Used for comparison of recorded and reference 3D data
- Prepared for automated calibration with calibration software
- Supplied on a USB drive
Calibration software
- Automated, statistical 3D calibration algorithm
- Determines scales in X, Y, Z and all shear factors
- Gives corrections parameters for acquisition system or pre-recorded data
- Single user license for Windows 10 ... 7
