In-Situ Microscopy

EBAC

Electron Beam Absorbed Current - measurment of Electron Beam Absorbed Currents in electron microscopes. Advanced imaging mode for environmental and high-temperature SEM

BSE Topography

Live quantitative surface topography in SEM from BSE signals

Electron Counting

Low-dose imaging in Scanning Transmission Electron Microscopy (STEM) with single electron counting

Digital Image Acquisition

The most powerful and versatile image acquisition system, based on our established DISS6 engine

3D Calibration Kit

System for topography calibration for electron microscopes.

Topographic Analysis

System for live and calibrated height measurements, with SEM or FIB-SEM

HT BSE detector

• 4Q segmented electrodes with built-in biasing
• Electrodes are light-blind and compatible with laser heating
• Bias voltage to repel secondary electrons and thermal electrons
• Electrodes can be coated in various materials
• easy to disassemble, cleane and recoat

MICS signal amplifier

• For extendend imaging channels, from 4x to 16x
• Channel independendt controls for brightness and contrast
• Advanced input offset and gain controls and calibration
• USB2 controlled and fully integrated with the microscope control software
• optional installed in the BSE retraction mechanism

Vacuum Controller

• automatic monitoring and control of turbo and rotary pumps, IGP, Penning and Pirani gauges and valves
• Automatic vacuum on/off, standby and baking procedures
• real-time vacuum and IGP triggers and timeouts
• automatic recovery from power cut

Stage controller

• For automatic positioning and rotation
• Integrated click-and-move, rotation and large area map acquisition
• Configurable software limits for collision avoidance
• USB2 controlled and fully integrated with the microscope control software

SEM Scan Controller (DISS6)

• Latest generation electronics for image scanning
• Calibrated 16-bit signal digitization
• Standard 4x simmultaneous SEM signal inputs
• Added 8x simmultaneous inputs for in-situ preamplifiers
• Independent brightness & contrast controls for each signal

TEM Scan Controller (DISS6)

• Integrated scan generator and image acquisition
• Large pixel resolution and high scanning speed
• Second stage digital amplification for EA
• Simultaneous BF, HAADF and EA inputs

DISS6 image acquisition

• Integrated software for image acquisition and amplifier control
• Advanced tools for colour mixing, current-voltage (IV) and line scans
• Inspection and export functions of calibrated image data

DIPS6 image processing

• Dedicated software for display of image data
• Inspection of acquisition settings in metadata
• Extraction of quantitative pixel value

microShape

• Offline 3D viewer of BSE topography data
• Measurement of line profiles, heights, distances and angles in 3D
• 3D data processing including data correction and overlay

Pulse digitiser

• Compatibility: Gresham, Kevex, Noran, Link, EDAX or PGT
• Spectrum size: 1,024, 2,048 and 4,096 channels
• Throughput rates: 300 kcps/channel max.

3D calibration standards

• Marker based 3D structures for X, Y, Z calibration
• Reference information traceable to Physikalisch-Technische Bundesanstalt (PTB)
• With reference marks for automated calibration

Atomic number reference sample

• SEM stub with Faraday cup and BSE reference materials
• Series of reference sample have increasing atomic number
• Surfaces of reference materials are polished for pure compositional contrast