Geometrical Analysis
What is geometric analysis in the electron microscope?
Geometrical analysis in SEM is a growing set of related techniques and tools dealing with measurement and management of locations, distances, angles, shapes, volumes and derrived parameters. Current emphasis is on techniques that enable three dimensional (3D) exploration and modelling of microstructures.
These advanced techniques have taken a leap based on the latest generation of calibrated electronics and quantitative software, which reduce complexity in operation, automate reconstruction algorithms and improve accuracy of final results.
Our Solutions
Discover techniques, solutions, and products tailored for geometrical analysis in the electron microscope.
Techniques: Solutions for techniques such as BSE Topography or 3D Calibration
Systems: comprehensive solutions for applications such as Topographic Analysis or the point electronic 3D Calibration Kit
Parts: point electronic products for advanced geometrical analysis
BSE Topography
Live quantitative surface topography in SEM from BSE signals
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3D Calibration
Calibration technologies in 3D microscopy for fast and accurate calibration of electron and light microscopes.
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Topographic Analysis
System for live and calibrated height measurements, with SEM or FIB-SEM
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3D Calibration Kit
System for topography calibration for electron microscopes.
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BSE Acquisition
Quantitative BackScattered Electron (BSE) acquisition system
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3D calibration standards
- Marker based 3D structures for X, Y, Z calibration
- Reference information traceable to Physikalisch-Technische Bundesanstalt (PTB)
- With reference marks for automated calibration
Premium BSE detector
- Four quadrant Si sensor for advanced BSE work
- In-situ preamplification for optimum efficiency and speed
- Optional low-kV sensors
MICS signal amplifier
- For extendend imaging channels, from 4x to 16x
- Channel independendt controls for brightness and contrast
- Advanced input offset and gain controls and calibration
- USB2 controlled and fully integrated with the microscope control software
- optional installed in the BSE retraction mechanism
SEM Scan Controller (DISS6)
- High-performance calibrated electronics for image acquisition
- Integrated and automated amplification of BSE signals
- With truly simultaneous acquisition of all BSE signals
DISS6 acquisition with topography plugin
- Software for live BSE topography reconstruction and visualisation
- Quantitative image acquisition and detector control
- Height and texture save to standard file formats
microShape
- Offline 3D viewer of BSE topography data
- Measurement of line profiles, heights, distances and angles in 3D
- 3D data processing including data correction and overlay
microCal
- Offline 3D calibration and reporting software
- Automated calculation of scales and shearing between all coordinate axes
- Analyses of non-linear scanning deviations
DIPS6 image processing
- Software for display of quantitative image data
- Inspection of acquisition settings in metadata
- Extraction of quantitative pixel values
Papers
Posters
- Machine Learning and Topographic SEM Imaging for Software Assisted Fractography PDF
- Three-dimensional measurement of tip shape geometry with SEM PDF
- A robust 3D scanning technique for SEM PDF
- In-situ Messung der 3D-Topografie von Bruchflächen im REM PDF
- Calibration of 3D reference standards using metrological large range AFM and calibrated confocal microscopy PDF