Premium BSE detector
Premium BSE detector is our highest performance Si-based detector for materials science, geology and industrial applications.
A four-quadrant sensor geometry is used, coupled with four independent in-situ preamplifiers, to give full flexibility for the traditional COMPO and TOPO modes, or the new calibrated 3D measurement mode with topographic reconstruction.
A motorised insertion/retraction mechanism is included, with alignment table for the left/right and up/down directions, and bellows for reliable vacuum. An optional MICS-4 amplifier can be embedded into the detector, for a fully self-contained detector with quantitative amplification, independent brightness and contrast controls, and hardware signal mixing.
Quantitative BSE (qBSE)
- map density with high-spatial resolution
- characterise distribution of phases
- reveal crystallography with orientation contrast
BSE Topography
- analyse 3D surfaces and complex surfaces
- monitor in-situ reactions, including high-temperature
- characterise milling and depoisition in FIB-SEM
Premium BSE sensor
- detector-grade Si chip
- four-quadrant (4Q) geometry
- chip on ceramic board mount
- 6 mm inner diameter
- 20 mm outer diameter
- 1 kV minimum acceleration voltage
In-situ preamplifier
- in situ mount
- 105 V/A gain
- 200 ns minimum dwell time (gain dependent)
Mechanics (LIMA)
- Port mounted, with vacuum bellows
- Motorized insertion/retraction motion
- -4...4 mm manual lateral and height alignment
- 10 µm repositioning step size
- Integrated touch alarm, with automatic stop and retraction
- Passive cooling
Main amplifier (MICS-4) (optional)
- 4x independent signal channels
- -1.25 … 1.25 V (-50…50 mV with attenuator) input offset
- 1x … 1,800x gain
- -1.25 … 1.25 V output offset
- 3.4 MHz…34 Hz low-pass filter
- Automated 4Q global brightness and contrast
- Automated input offsets (dark correction)
- Automated gain normalization (bright correction)
- COMPO hardware mix signal (sum of BSE1...BSE4)
- TOPO hardware mixed signal (mix of BSE1...BSE4)
Software - Control
- Detector drawing with selectable quadrants
- Bias, brightness and contrast controls
- Individual quadrants, or grouped COMPO/TOPO control
- Automatic go to inserted/retracted positions
- Fine repositioning/adjustments in mm units
- Windows 11 … Windows 7
Software - Automation
- XML file format open/save settings
- JSON/RPC interface for remote control
- Automated brightness and contrast
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Premium BSE detector
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