microCal – point electronic GmbH

Easy-to-handle and automated geometric calibration of your microscope with 3D calibration samples. 3D measurement data of marker-based calibration structures are automatically analysed and compared to the provided reference data. Calculation and documentation of scales, shear factors and remaining non-linear errors in all three spatial dimensions.

One Step: Simultaneous processing of lateral and vertical calibration parameters (scale, shear)
One Model: Determination of coupling (shear) between vertical and lateral axes
One Click: Due to advanced image processing and statistical methods, calibration is extremely efficient and accurate
One Reference: Software and calibration structures are suitable for different measurement devices

[The calibration structures and the calibration software were developed by m2c, a brand of point electronic GmbH].

Applied calibration parameters

3 scale factors for the co-ordinate axes
3coupling factors for coupling between all co-ordinate axes (orthogonal deviation)
Remaining non-linear errors in all three spatial dimensions

Features and functions

Automated calibration due to advanced image processing algorithms, including detection of sample orientation and sub-pixel co-ordinate measurement
Reliable processing of calibration parameters due to advanced statistical methods (including leastsquares methods and outlier detection)
Mathematical and graphical accuracy analysis
Results and settings are saved into a project file
Integrated export functions for PDF protocol files or for ASCII data (for further use)
Calibration parameters are saved for data correction of all further measurements performed by the customer’s microscope
Different SPM/3D file formats and import filters for ASCII and image data files are included

microcal - software screenshots

Papers

Posters

Calibration of 3D reference standards using metrological large range AFM and calibrated confocal microscopy PDF