Wafer transport robots in 300mm wafer fabs. make 9 kHz fields that limit the performance of electron beam tools and are a barrier to achieving the next semiconductor CD node. The SC26 is a wide bandwidth system that can cancel magnetic fields from DC to above 9 kHz. To achieve its wide bandwidth, the SC26 uses low inductance field cancelling cables, installed in the electron beam tool enclosure.
The SC26 has inputs for two 200 kHz AC field sensors (blue) that it can mix to optimise the electron beam tool performance. These provide useful cancelling down to 10 Hz. Cancelling can be extended down to DC by adding a “Sensor SC24/DC+AC” and a sensor combiner for each input channel used.
The SC26 cannot be used with larger cables in a “room” installation such as the SC24 system, which operates at lower frequencies.
[point electronic GmbH is Spicer Consulting partner in Germany for Magnetic Field Cancelling systems]
