SEM Scan Controller
Powerful and versatile scan generator and image acquisition system
Digital Imaging Scanning System (DISS) generation 6, is the latest generation and highest performance scan generator and image acquisition system for SEM. DISS6 is able to generate conventional rectangular (raster) scans as well as point-based (vector) scans, and simultaneously acquire 4 analog and 12 digital inputs. Signal inputs may be seamlessly expanded to further 16 analog inputs with the addition of embedded MICS amplifier. Key performance figures are 10 ns minimum pixel dwell time and 500 MegaPixels maximum resolution.
The system is fully integrated and controlled over USB or ETH interfaces using the DISS6Control library for Windows and Linux. An SDK is available for integration into control and acquisition apps, including documentation and demo source code. Default app for independent use is the DISS6 image acquisition software.
DISS6 image scanning is a core component in a wide range of techniques.
Electron Beam Induced Current (EBIC)
- map internal electric fields in semiconductors and ceramics
- characterise electrical activity of defects
- localise material and/or processing defects
Resistance Contrast Imaging (EBAC/RCI)
- localise open and shorts in inteconnects
- identify weaknesses in oxide layers
- map resistance with high spatial resolution
Electron Beam Induced Current Change (EBIRCh)
- localise defects in transistors with high-spatial resolution
- pin-point leackages/weknesses in oxides
- similar with Optical Beam Induced Resistance change (OBIRCh)
Quantitative BSE (qBSE)
- map density with high-spatial resolution
- characterise distribution of phases
- reveal crystallography with orientation contrast
BSE Topography
- analyse 3D surfaces and complex surfaces
- monitor in-situ reactions, including high-temperature
- characterise milling and depoisition in FIB-SEM
3D scanning in SEM
- obtain 3D models of microscopic objects
- characterise distribution complex surfaces
Standard inputs
- 8× calibrated analogue inputs (A1...A4, B1...B4)
- 12× digital inputs (D1...D12)
- 3× trigger inputs (Pixel, Line and Frame)
- scan pause/resume input
Standard outputs
- 2× calibrated analogue scan outputs (X, Y)
- 2× calibrated analogue magnification outputs (X, Y)
- 2× external control outputs (Blank and Scan)
- 4× clock outputs (Pixel, Line, Frame and Blank)
- DVI display output
Control interfaces
- USB2
- TCP/IP
Scan modes
- Sawtooth scan mode
- Vector scan mode
- Chopped scan mode
- Subpixel scan mode
Scan generator
- 16-bit ±3.5...±12V analogue X, Y scans
- 16-bit 3.5...12V analogue X, Y magnifications
- 10-bit ±1.8V analogue X, Y shifts
- Gnd., 5V, 15V external bank/scan
- TTL pause/resume
- TTL clock and synchronisation
- 0.5 GPixels maximum frame size (software limit)
- 10 ns...10 ms pixel dwell time (selection dependent)
- 0...256× frame average
- 0...50× line average
- 1...32,000× pixel average (oversampling)
- Mains frequency synchronization
Signal digitization
- 12-bit for analogue A1..A4, B1...B4
- 16-bit for TTL D1...D12
- 32-bit for TTL D1...D6 (optional)
Housing
- 9.5-inch desktop
- 19-inch desktop (optional)
- 19-inch rack-mountable (optional)
Touch display
- Scan status overview
- Installed options list
- Scan detailed information
- TCP connections settings
- DVI output settings
Electron counting (optional)
- 2× counter inputs (ECL1...ECL2)
- 2× threshold level outputs
- 1 GHz bandwidth
CCD-video input (optional)
- 1x PAL video input
Lock-in amplifier (optional)
- 1× calibrated analogue input (LIA)
- TTL reference frequency output
- 20-bit digitisation
- 1 μs...10 milliseconds pixel dwell time
MICS amplifier (optional)
- 16× calibrated inputs (M1...M16) maximum
- -1...1 V input offset M1...M16
- 1× ... 1,800× gain M1....M16
- -1...1 V output offsets M1...M16
- 3.4 MHz...34 Hz low-pass filter
- 4× averages M1...M4, M5...M8, M9...M12, M13...M16
- Automated 4Q global brightness and contrast
- Automated input offsets (dark correction)
- Automated gain normalisation (bright correction)
- Automated low-pass filter (matching pixel dwell time)
Housing
- 19-inch rack-mountable
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DISS6 image scanning
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