SEM Electrical Analysis
Electrical Analysis system for high-quality visualization of electronic properties and defects
The Electrical Analysis system supports all electrical analysis techniques in SEM, including EBIC, RCI, and EBIRCH, for precise, high-quality visualization of electronic properties and defects.
It is used for research and development of a wide range of novel devices, from large-area solar cells, photovoltaics, optoelectronics and high-power transistors to nanometer sized wires, pillars and dots.
Advanced features for rapid, intuitive analysis and enhanced application versatility:
✅ Live color mixing
✅ Sample biasing and compensation
✅ Ultra-fast synchronized Multi-channel multi-technique imaging for correlative analysis
✅ RCI dedicated in-situ preamplification
✅ Low noise in-situ preamplification
✅ Scan mode assisted beam blanking for Lock-In EBIRCH
The system is designed for quantitative measurements, therefore electronics are factory calibrated and the software is designed for automated metadata management and measurements.
The system consists of hardware, software and selectable options.
Explore electrical properties at the microscale
Use all electrical analysis techniques in SEM.
Maps of internal electric fields
Map of active areas of junctions and contacts
Perform quantified reference sample verification.
Observe electrical behaviour under bias, and measure diffusion length.
Electrical activity of defects
Identify regions of elevated recombination activity.
Continue with high-resolution techniques.
Export data to quantify recombination intensity.
Resistance and conductivity
Map electrical resistance to identify shorts, opens, weaknesses, and leakage paths in devices.
Multi-signal imaging - now with topography
Acquire and visualize electrical data together with composition and topography such as EBIC with topography, for enhanced correlative workflows.
Noise removal
Use the built-in lock-in amplifier with scan-mode assisted beam blanking to remove high-current offsets and low-frequency noise.
Versatile applications
In-situ ultra-fast low-noise preamplifier with pA noise level for sensitive devices and minimum carbon contamination.
Optional RCI in-situ preamplifier for low resistive samples, down to 100 Ohm.
The highest level of integration and automation
The EA for SEM software includes EA amplifier control, EA and SEM image acquisition, automated quantification, the current-voltage sweep tool, the live image mix tool and works with standard file formats.
Customizable workflow: Creatable and configurable buttons and scan settings, including fast scan for alignment, highresolution EA profile for analysis, and simultaneous EA/SE scan for localization.
Direct correlation: Simultaneous acquisition of Electrical Analysis with up to 20 further detector signals, live signal mixing and processing tools.
Integrated current-voltage sweep tool: Configurable range, points, and timing to verify electrical connections and inspect for beam damage.
Integrated amplifier control: Software integrated, complete control of all amplifier functions, including routing, calibration, gains, offsets, bias and compensation. Auto time filter matches scan speed.
microDIP processing app: Full image and metadata viewer with automated quantification, pseudo-colors, profile line extraction, measurement tools and automated diffusion length determination.
Best quantitative EA system for SEM
As a complete solution, all electronics are fully integrated and controlled via software.
EA Amplifier
Wide range amplification for maximum flexibility, with built-in voltage bias and current compensation, factory calibrated gains and offsets
EA Imaging
Multi-channel imaging system for simultaneous acquisition of EA and other SEM signals, with optional lock-in.
Display Panel
Hardware control panel with touch display and encoders for easy, fast and precise software control.
EA sample holder
Compatible with various SEM stages, including built-in Faraday cups and optional preamplifier and load-lock compatibility.
DISS 6 and microDIP apps
DISS 6 image acquisition and amplifier control, with color mixing, current-voltage (IV), line scans, inspection and export functions of calibrated image data. microDIP for image processing.
Electrical Analysis for SEM - brochure
The best quantitative electronics and software for analysis of electrical properties in SEM and FIB/SEM
EA Amplifier
- Calibrated high-speed electronics, with in-situ and ex-situ preamplifiers
- Complex multi-stage amplification for imaging, with automatic low-pass filter
- Integrated pico-ammeter for beam current measurements
- Integrated voltage source for biasing
- Integrated current source for compensation
EA Imaging controller
- Latest-generation scanning electronics
- Calibrated digitization at 20-bit (EA) or 12-bit (SEM), each saved to 16-bit
- 4x calibrated, simultaneous SEM signal inputs plus 1x calibrated EA input as standard
- Up to 32,000x oversampling via pixel averaging (max. 256x frame averaging, 256x line averaging)
- 64k × 64k pixels maximum resolution (0.5 GPixel maximum image size)
- Pixel dwell time from 1 µs (EA input limit) to 6 ms
- Calibrated X and Y scan outputs, optional beam blank output
- Optional image, line, and pixel synchronization
Display Panel
- Precise, intuitive and robust control of events and actions
- Display 480 x 800 px (4.3“) with resistive touch
- 4 encoders with 360 increments per revolution and beeper and vibration motor for haptic and acoustic feedback
Premium EA sample holder
- 2x probes for ex-situ preamplifier
- 2x probes for ex-situ preamplifier
- Cross-sectional and plan-view mounts
- Integrated Faraday cup
DISS6 image acquisition
- Integrated software for image acquisition and amplifier control
- Advanced tools for colour mixing, current-voltage (IV) and line scans
- Inspection and export functions of calibrated image data
DIPS6 image processing
- Dedicated software for display of image data
- Inspection of acquisition settings in metadata
- Extraction of quantitative pixel value
EA sample holders
- 2x probes for ex-situ preamplifier
- Cross-sectional and plan-view mounts
- Integrated Faraday cup
Custom sample holder
- Sample holders for various applications on request.