DISS6 – point electronic GmbH

Image acquisition and control functions are integrated into the DISS6 software to manage multiple devices, from scan controllers, amplifiers and detectors to full SEMs. Workflow is highly optimized with configurable panes and buttons, simultaneous signal acquisition and live signal inspection tools. Standard features include region of interest (ROI), line and point scans, live image mix in colour and automatic quantification of analog signals.

Optional plugins fit into a range of advanced techniques, including current-voltage plugin for Electrical Analysis, topographical reconstruction plugin for Geometrical Analysis and IR Chamberscope framegrabber plugin for SEM upgrade kits. The software is built on standard file formats, for image data, metadata, configuration, settings, and remote communication. It is Windows 11…7 compatible and uses USB or ETH interfaces to communicate with the hardware.

Fully configurable workflows for individual needs

Each scan profile in the workflow is fully configurable
New scan profiles may be added from templates for live view, ROI, slow scan and mapping
Live view and ROI scans are optimised for fast alignment and navigation
High-resolution slow scans are best for simultaneous signals, localization and mixing
Mapping scans capture digital signals from pulse processors

Tools for live display, colour mixing and quantification of pixel values

All simultaneous signals are displayed as tiled images
Live line scan and histogram are displayed for best brightness and contrast adjustments
Calibrated measurements from pixel values are displayed live in the inspection tool
All available signals may be mixed in live color image

Area, line and point measurements for analytical techniques

Area, line and point scan profile enable advanced control of acquisition parameters
Subpixel scans improve sampling for complex samples
Multiple live line profile graphs are displayed for simultaneous signals
Scan geometry and data is exported to XLS and CVS

Images and data are saved in standard file formats

TIF un-compressed grayscale data
JPEG compressed grayscale data
PNG colour images
XMP metadata
GGR colour gradients
XML formula
CSV pixel values

BSE Topography

BSE topography plugin provides integrated live 3D reconstruction of topography data from 4Q BSE detector signals with shape -from-shading. It is applied in SEM and FIB-SEM for a wide range of measurements, from basic coordinates, distances or angles to more advanced volume, step height, or roughness characterization.

Live 3D view of topography data with various options for rendering and coloured views, with rotate, shift, zoom and scale
Calculate topography independent backscatter values and gradients and apply as texture
Save rendered 3D views (BMP), topography data (AL3D, SDF, 16-bit TIFF) and texture (TIFF)
Adjust and apply geometric scan corrections
Save calibration parameter for different SEM setups
Adjust and apply lateral and height scale correction (requires 3D calibration standard MMC-80-4BSD)
Independent from changing brightness and contrast of BSE-signals (requires calibrated amplifier MICS)
Free configurable detector geometry (WD correction for different height mounting, radial distance, mounting angle)

Current-Voltage sweep

Current-Voltage (IV) sweep tool is using the integrated bias voltage source and current measurement in the EA amplifiers and EFA controllers to automatically record device curves. It is used to verify correct electrical connections to the device, select bias volage for EBIC and EBIRCH techniques, and check for beam damage over the duration of the experiment.

Configurable voltage range, number of points and measurement time
Auto-range for the entire sweep, or for each sweep point
Live plot display during measurements
Export of plot to image file, and data to spreadsheed

DISS6 software - image control and acquisition
Topography Plugin
DISS6 BSE Topography

Papers

Posters

A synoptic view of nanostructures PDF

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