BSE Topography

BSE Topography - live quantitative 3D surface topography

BSE Topography is a Geometrical Analysis technique in electron microscopy used for high-resolution 3D characterisation of features and shapes of surfaces. It is applied in SEM and FIB-SEM for a wide range of measurements, from basic coordinates, distances or angles to more advanced volume, step height, or roughness characterisation. It is an advanced form of BSE, as it is able to separate topography from composition and therefore to provide information on height and density simultaneously.

BSE Topography is key technique for analysis that must distinguish between topography and composition. It is also used for microstructures with very high aspect ratio, beyond the range of scanning probe microscopes.

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Topographical Analysis system

With the system for topographic analysis, point electronic offers the possibility to perform live and calibrated height measurements in SEM or FIB-SEM.

The system consists of our Premium BSE Detector, our DISS6 SEM Scan Controller as high-performance scan generator and image acquisition system, a 3D Calibration Standard and a Multi-Channel Signal Amplifier (MICS).

to the Topographical Analysis system

DISS6 SEM Scan Controller

Premium BSE Detector

3D Callibartion Standard

MICS Signal Amplifier

• Fractography