BSE Topography
BSE Topography is a Geometrical Analysis technique in electron microscopy used for high-resolution 3D characterisation of features and shapes of surfaces. It is applied in SEM and FIB-SEM for a wide range of measurements, from basic coordinates, distances or angles to more advanced volume, step height, or roughness characterisation. It is an advanced form of BSE, as it is able to separate topography from composition and therefore to provide information on height and density simultaneously.
BSE Topography is key technique for analysis that must distinguish between topography and composition. It is also used for microstructures with very high aspect ratio, beyond the range of scanning probe microscopes.

Complex surfaces
- Characterisation of fractured samples
- Characterisation of corroded surfaces
- Characterisation of eroded materials

High-precision mechanical tools
- Inspection of probing tips
- Inspection of cutting edges

In-situ surface dynamics
- High-temperature experiments
- In-situ reactions

BSE Acquisition
Quantitative BackScattered Electron (BSE) acquisition system
Learn more…
Topographic Analysis
System for live and calibrated height measurements, with SEM or FIB-SEM
Learn more…
Digital Image Acquisition
The most powerful and versatile image acquisition system, based on our established DISS6 engine
Learn more…
3D Calibration Kit
System for topography calibration for electron microscopes.
Learn more…
SEM Upgrade Kits
A second life for your exisiting SEM, thanks to new electronics, software and controls.
Learn more…Live reconstruction
- Live surface height reconstruction from BSE signals
- Built-in 3D surface visualisation tool
- Configurable workflows with integrated SE and BSE scan profiles
Automated calibration
- Calibration of scale in all three spatial directions
- Orthogonality of all axes (shearing)
- Analysis of nonlinear deviations
Universal system
- Turnkey add-on system for any SEM or FIB-SEM
- Port or polepiece-mounted 4Q BSE detector
- Calibrated scanning and image acquisition
Detector options
- Monolithic or hybrid quadrant sensors for high resolution
- Optional light blind sensors for high temperature/in situ SEM
- In situ pre-amplification for minimum noise and maximum speed
3D software
- Pan, rotate, tilt, zoom and scale Z
- Enhance with shadows and custom colour coding
- Export to standard binary AL3D and plain text SDF formats
-
Fractography
-
Cutting edge
-
Tactile probing tip
-
Videos: DISS6 BSE Topography
-
-
Papers
- Fracture characteristics and fracture mechanisms using deep learning and topography data PDF
- Development of Geometrical Analysis in SEM PDF
- Three-dimensional measurement of tip shape geometry with SEM PDF
- Live quantitative BSE acquisition with standard-less calibration PDF
- In-situ Messung der 3D-Topografie von Bruchflächen im REM PDF