Topographic Analysis
BSE topography in electron microscopy is utilized to examine surface topographical features at the micro- and nanoscale, helping researchers distinguish variations in height and morphology. This technique is invaluable for characterizing sample surfaces in SEM and FIB-SEM environments.
Our BSE Topography System offers the ability to perform live calibrated height measurements with any SEM or FIB-SEM, enabling researchers to accurately measure surface heights, distinguish topography from composition, monitor in-situ surface changes, visualize complex surfaces in three dimensions, and seamlessly continue live topographical analysis with the convenience of off-line analysis.
The software includes live surface height reconstruction from BSE signals, a built-in 3D surface visualization tool, and the flexibility of configurable workflows with seamlessly integrated SE and BSE scan profiles.
The system consists of hardware and software.
Measure surface height with SEM
- Use conventional segmented BSE signals
- Measure live with automated topographic reconstruction
- Save topographic data in standard file formats
Topography-composition distinction
- Resolve ambiguities in image interpretation
- Reach a wider audience with 3D models, visualisation and printing
- Measure 3D distances and volumes
In-situ surface dynamics
- Record surface evolution during in-situ experiments
- Measure deviations from nominal surface
- Quantify 3D changes for different processes
Complex surfaces in 3D
- Add texture from SE, EDS or EBSD maps
- Apply automatic colour gradients as texture
- Export 3D screenshots for high-impact visualisation
Calibrate and measure heights
- Calibrate measurements with dedicated 3D samples
- Measure 3D positions, distances and angles
- Measure and report height profiles
Live topography with off-line analysis
- Import data into full feature analysis software
- Measure surface roughness and analyse texture
- Analyse morphology, grain and particle distribution
3D calibration standards
- Marker based 3D structures for X, Y, Z calibration
- Reference information traceable to Physikalisch-Technische Bundesanstalt (PTB)
- With reference marks for automated calibration
Premium BSE detector
- Four quadrant Si sensor for advanced BSE work
- In-situ preamplification for optimum efficiency and speed
- Low-kV sensors
MICS signal amplifier
- For extendend imaging channels, from 4x to 16x
- Channel independendt controls for brightness and contrast
- Advanced input offset and gain controls and calibration
- USB2 controlled and fully integrated with the microscope control software
- optional installed in the BSE retraction mechanism
DISS6 SEM Scan Controller
- High-performance calibrated electronics for image acquisition
- Integrated and automated amplification of BSE signals
- With truly simultaneous acquisition of all BSE signals
DISS6 acquisition with topography plugin
- Software for live BSE topography reconstruction and visualisation
- Quantitative image acquisition and detector control
- Height and texture save to standard file formats
microShape
- Offline 3D viewer of BSE topography data
- Measurement of line profiles, heights, distances and angles in 3D
- 3D data processing including data correction and overlay
microCal
- Offline 3D calibration and reporting software
- Automated calculation of scales and shearing between all coordinate axes
- Analyses of non-linear scanning deviations
DIPS6 image processing
- Software for display of quantitative image data
- Inspection of acquisition settings in metadata
- Extraction of quantitative pixel values