Topographic Analysis
BSE topography in electron microscopy is utilized to examine surface topographical features at the micro- and nanoscale, helping researchers distinguish variations in height and morphology. This technique is invaluable for characterizing sample surfaces in SEM and FIB-SEM environments.
Our BSE Topography System offers the ability to perform live calibrated height measurements with any SEM or FIB-SEM, enabling researchers to accurately measure surface heights, distinguish topography from composition, monitor in-situ surface changes, visualize complex surfaces in three dimensions, and seamlessly continue live topographical analysis with the convenience of off-line analysis.
The software includes live surface height reconstruction from BSE signals, a built-in 3D surface visualization tool, and the flexibility of configurable workflows with seamlessly integrated SE and BSE scan profiles.
The system consists of hardware and software.

Measure surface height with SEM
- Use conventional segmented BSE signals
- Measure live with automated topographic reconstruction
- Save topographic data in standard file formats

Topography-composition distinction
- Resolve ambiguities in image interpretation
- Reach a wider audience with 3D models, visualisation and printing
- Measure 3D distances and volumes

In-situ surface dynamics
- Record surface evolution during in-situ experiments
- Measure deviations from nominal surface
- Quantify 3D changes for different processes

Complex surfaces in 3D
- Add texture from SE, EDS or EBSD maps
- Apply automatic colour gradients as texture
- Export 3D screenshots for high-impact visualisation

Calibrate and measure heights
- Calibrate measurements with dedicated 3D samples
- Measure 3D positions, distances and angles
- Measure and report height profiles

Live topography with off-line analysis
- Import data into full feature analysis software
- Measure surface roughness and analyse texture
- Analyse morphology, grain and particle distribution

microShape - surface topography
- Load, view and edit height and texture layers
- View and manipulate data in 3D
- Extract and export 3D line profiles
- Export standard PLY files for 3D printing

Quantitative 4Q BSE
- Factory calibrated amplification and digitisation
- Automatic offset and gain corrections
- Live inspection of calibrated pixel values

Live topography
- Pan, rotate, tilt, zoom and scale height
- Enhance views with shadows and pseudo-colour
- Texture with BSE average or surface gradients

Automated 3D calibration
- Use 3D reference sample to calibrate acquisition
- Get automatic scale parameters for x, y and z
- Save scale parameters for different SEM configurations

3D calibration standards
- Marker based 3D structures for X, Y, Z calibration
- Reference information traceable to Physikalisch-Technische Bundesanstalt (PTB)
- With reference marks for automated calibration

Premium BSE detector
- Four quadrant Si sensor for advanced BSE work
- In-situ preamplification for optimum efficiency and speed
- Optional low-kV sensors

MICS signal amplifier
- For extendend imaging channels, from 4x to 16x
- Channel independendt controls for brightness and contrast
- Advanced input offset and gain controls and calibration
- USB2 controlled and fully integrated with the microscope control software
- optional installed in the BSE retraction mechanism

SEM Scan Controller (DISS6)
- High-performance calibrated electronics for image acquisition
- Integrated and automated amplification of BSE signals
- With truly simultaneous acquisition of all BSE signals

DISS6 acquisition with topography plugin
- Software for live BSE topography reconstruction and visualisation
- Quantitative image acquisition and detector control
- Height and texture save to standard file formats

microShape
- Offline 3D viewer of BSE topography data
- Measurement of line profiles, heights, distances and angles in 3D
- 3D data processing including data correction and overlay

microCal
- Offline 3D calibration and reporting software
- Automated calculation of scales and shearing between all coordinate axes
- Analyses of non-linear scanning deviations

DIPS6 image processing
- Software for display of quantitative image data
- Inspection of acquisition settings in metadata
- Extraction of quantitative pixel values
Papers
- Fracture characteristics and fracture mechanisms using deep learning and topography data PDF
- Development of Geometrical Analysis in SEM PDF
- Three-dimensional measurement of tip shape geometry with SEM PDF
- Live quantitative BSE acquisition with standard-less calibration PDF
- In-situ Messung der 3D-Topografie von Bruchflächen im REM PDF