3D calibration is a technique for validation of devices that measure the spatial geometry of sample surfaces.
The resulting device parameters are used to either adjust the device or to correct the measurement data. The 3D calibration is suitable for use with different 3D microscopy techniques, such as CLSM (confocal/laser scanning microscopy), AFM (atomic force microscopy) or 3D SEM techniques.
In the 3D calibration, not only the lateral and height scales of the microscope are determined by comparing given reference data with measured geometry parameters, but also dependencies between the measurement axes and non-linear measurement errors. The 3D calibration therefore always consists of a software component and the actual 3D calibration structure.
To ensure an automated and reliable calibration process, pyramid structures with spatially distributed fiducial marks are used, which can be measured very fast and with high precision using image processing. Together with a certificate, the traceability of the measurements on the calibrated microscope is thus guaranteed.