3D Calibration Kit
The 3D calibration kit enables automatic three-dimensional geometric calibration of your microscope.
It includes
the 3D calibration standard, which is used for the calibration measurement with the microscope to be calibrated
the microCal calibration software, which is then used to analyze the measured topography data
The calibration software automatically determines the spatial scale parameters by comparing the measurement data with the corresponding reference data. The results enable a precise accuracy assessment and, if necessary, a scale correction of the microscope.
Advantages:
- Simultaneous processing of lateral and vertical calibration parameters (scale, shear)
- Determination of coupling between all vertical and lateral axes
- Calibration is extremely efficient and accurate due to advanced image processing methods
- Software and calibration structures are suitable for different microscopes
- Optional spherical segment for the signal adjustment of segmented backscatter detectors (BSE)
Calibration standards and software are compliant with VDI/VDE Guideline 2656 “Determination of geometrical quantities by using of Scanning Probe Microscopes – Calibration of measurement systems”.
The system consists of hardware and software.
3D calibration - the system solution
With the 3D Calibration Kit, point electronic offers the ability to perform geometric calibration of 3D microscopes, particularly scanning electron microscopes equipped with topography capabilities.
It consists of a calibration standard with reference data and our microCal calibration software.
Calibration standard with reference data
- 3D calibration standard with reference marks for automated calibration
- Reference data for traceable calibration
- Applicable for different microscope types (3D-SEM, AFM, CLSM)
Calibration Software microCal
- Automated calculation of all spatial calibration parameter with statistical methods
- Calculation of lateral and height scales and spatial shearing
- Export of device correction parameters and documentation of results
