3D calibration standards
The 3D calibration structures consist of an array of multi-level individual pyramids. There are ring-shaped reference marks (nanomarkers) on the calibration structure, the centers of which are measured with high precision. These enable the determination of the scales and couplings (shears) of all three coordinate axes of the measuring device used.
For each calibration structure you will receive a file with the associated reference information. By using coded reference marks, the calibration structures are suitable for automated calibration processes. To do this, use our 3D calibration kit with the calibration software microCal.
The 3D calibration structures can be used universally (3D SEM, AFM, CLSM). Other variants of these calibration structures as well as customer-specific adjustments are possible on request.
Calibration samples
- FIB-SEM deposited 3D structures with reference marks for automated calibration
- A range of sizes for SEM, AFM and optical 3D systems
- 3x pyramids for calibration in X, Y and Z directions
- 1x spherical element for adjustment of 4Q BSE detectors
Calibration data
- Calibrated 3D reference data acquired with a metrological SPM system
- Used for comparison of recorded and reference 3D data
- Prepared for automated calibration with calibration software
- Supplied on a USB drive
Calibration software
- Automated, statistical 3D calibration algorithm
- Determines scales in X, Y, Z and all shear factors
- Gives corrections parameters for acquisition system or pre-recorded data
- Single user license for Windows 11 ... 7
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Pictures
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