3D calibration standards

3D calibration for SEM, AFM and CLSM

The 3D calibration structures consist of an array of multi-level individual pyramids. There are ring-shaped reference marks (nanomarkers) on the calibration structure, the centers of which are measured with high precision. These enable the determination of the scales and couplings (shears) of all three coordinate axes of the measuring device used.

For each calibration structure you will receive a file with the associated reference information. By using coded reference marks, the calibration structures are suitable for automated calibration processes. To do this, use our 3D calibration kit with the calibration software microCal.

The 3D calibration structures can be used universally (3D SEM, AFM, CLSM). Other variants of these calibration structures as well as customer-specific adjustments are possible on request.

Advantages

One Step

Calibrate lateral and vertical calibration simultaneously in one measurement step

One Model

Enable determination of coupling between vertical and lateral axes

One Click

Benefit from extremely efficient and accurate calibration due to advanced image processing methods

One Reference

Process universal applications with one reference structure for SPM, CLSM, SEM or other

3D calibration structure for SEM

3D standards for calibration of topographical SEM measurements with 4-Quadrant BSE detector (4Q BSD).

The 3D SEM calibration structure consists of an array of three multi level single pyramids and a spherical element for the calibration of the four backscatter detectors. The spherical element has a base diameter of 10 µm and a height of about 1µm. The calibration structure includes circular reference marks (nanomarker) with exactly measured centre coordinates (reference information). In combination with our 3D calibration software microCal, the calculation of all three scales of your 4Q-BSE-detector system can easily be achieved. We provide the reference information as a data file together with the 3D calibration structure.

Seize 90x90 µm²:

• 4 structures
• 3 steps
• 1000 nm step height
• 3000 nm total height
• 38,5° gradient
• 800 nm Nanomarker diameter

Seize 45x45 µm²:

• 4 structures
• 3 steps
• 600 nm step height
• 1800 nm total height
• 56° gradient
• 600 nm Nanomarker diameter

_{(Hint: These specs contain only nominal values. The real dimensions differ from these nominal values. For calibration, the reference marks have to be used. To provide a traceable calibration, reference measurements are performed by the German metrological institute PTB upon request.)}

3D calibration structure für AFM

3D standards for calibration of topographical SPM measurements.

The 3D AFM calibration structure consists of an array of four multi level single pyramids. The design includes circular reference marks (nanomarker) with exactly measured centre coordinates (reference information). In combination with our 3D calibration software microCal, the calculation of all three scales and all three coupling (shearing) factors of the coordinate axes of your measurement device can easily be achieved. We provide the reference information as a data file with the 3D calibration structure.

3D SPM calibration structures are available for several scan areas, from 20 μm x 20 μm and up to 80 μm x 80 μm. The complete structure with four pyramidal elements (full area) or a single pyramidal element (quarter area) may be used for the automated calibration process.

Seize 90x90 µm²:

• 4 structures
• 3 steps
• 1000 nm step height
• 3000 nm total height
• 38,5° gradient
• 800 nm Nanomarker diameter

Seize 45x45 µm²:

• 4 structures
• 3 steps
• 600 nm step height
• 1800 nm total height
• 56° gradient
• 600 nm Nanomarker diameter

Seize 20x20 µm²:

• 4 structures
• 2 steps
• 300 nm step height
• 600 nm total height
• 46° gradient
• 400 nm Nanomarker diameter

_{(Hint: These specs contain only nominal values. The real dimensions differ from these nominal values. For calibration, the reference marks have to be used. To provide a traceable calibration, reference measurements are performed by the German metrological institute PTB upon request.)}

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