3D calibration standards

3D calibration for SEM, AFM and CLSM

The 3D calibration structures consist of an array of multi-level individual pyramids. There are ring-shaped reference marks (nanomarkers) on the calibration structure, the centers of which are measured with high precision. These enable the determination of the scales and couplings (shears) of all three coordinate axes of the measuring device used.

For each calibration structure you will receive a file with the associated reference information. By using coded reference marks, the calibration structures are suitable for automated calibration processes. To do this, use our 3D calibration kit with the calibration software microCal.

The 3D calibration structures can be used universally (3D SEM, AFM, CLSM). Other variants of these calibration structures as well as customer-specific adjustments are possible on request.

3D calibration structure - design

The 3D calibration structure consists of an array of:

3 multi level single pyramids
1 spherical element for the calibration of the four backscatter detectors (diameter: 10 µm, height: ca. 1µm)
reference marks (nanomarker)

The calibration structure includes circular nanomarker with exactly measured centre coordinates (reference information).

In combination with our 3D calibration software microCal, the calculation of all three scales of your 4Q-BSE-detector system can easily be achieved.

We provide the reference information as a data file together with the 3D calibration structure.

Advantages

One Step

Calibrate lateral and vertical calibration simultaneously in one measurement step.

One Model

Enable determination of coupling between vertical and lateral axes.

One Click

Benefit from extremely efficient and accurate calibration due to advanced image processing methods.

One Reference

Process universal applications with one reference structure for SPM, CLSM, SEM or other.

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