3D calibration standards – point electronic GmbH

The 3D calibration structures consist of an array of multi-level individual pyramids. There are ring-shaped reference marks (nanomarkers) on the calibration structure, the centers of which are measured with high precision. These enable the determination of the scales and couplings (shears) of all three coordinate axes of the measuring device used.

For each calibration structure you will receive a file with the associated reference information. By using coded reference marks, the calibration structures are suitable for automated calibration processes. To do this, use our 3D calibration kit with the calibration software microCal.

The 3D calibration structures can be used universally (3D SEM, AFM, CLSM). Other variants of these calibration structures as well as customer-specific adjustments are possible on request.

Calibration samples

FIB-SEM deposited 3D structures with reference marks for automated calibration
A range of sizes for SEM, AFM and optical 3D systems
3x pyramids for calibration in X, Y and Z directions
1x spherical element for adjustment of 4Q BSE detectors

Calibration data

Calibrated 3D reference data acquired with a metrological SPM system
Used for comparison of recorded and reference 3D data
Prepared for automated calibration with calibration software
Supplied on a USB drive

Calibration software

Automated, statistical 3D calibration algorithm
Determines scales in X, Y, Z and all shear factors
Gives corrections parameters for acquisition system or pre-recorded data
Single user license for Windows 11 ... 7

Pictures

Papers

Posters

Calibration of 3D reference standards using metrological large range AFM and calibrated confocal microscopy PDF