3D calibration standards

The 3D calibration structures consist of an array of multi-level individual pyramids. There are ring-shaped reference marks (nanomarkers) on the calibration structure, the centers of which are measured with high precision. These enable the determination of the scales and couplings (shears) of all three coordinate axes of the measuring device used.

For each calibration structure you will receive a file with the associated reference information. By using coded reference marks, the calibration structures are suitable for automated calibration processes. To do this, use our 3D calibration kit with the calibration software microCal.

The 3D calibration structures can be used universally (3D SEM, AFM, CLSM). Other variants of these calibration structures as well as customer-specific adjustments are possible on request.