Environment analysis of electron microscopes
The SC28 monitoring system is purposed-designed to monitor the environment for electron beam instruments, including Scanning Electron Microscopes (SEM), Transmission Electron Microscopes (TEM), Electron Beam Lithography tools and CDSEM tools.
It can log the spectrum and charts of ambient magnetic fields, vibrations, acoustic levels, temperature and relative humidity. It measures the magnetic fields, vibrations and acoustic levels at a frequency of 2 kHz and temperature/humidity at 1Hz or below. Measurements are taken continuously, with no gaps, so that no event is missed.
The SC28 software runs on a Windows PC that is connected to the same Local Area Network as the SC28/SI. It automatically detects the SC28/SI hardware without needing to know its IP address in advance. The SCplot program is included with the SC28 software and allows you to view and print results as well as save graphs for use in reports.
[point electronic GmbH is Spicer Consulting partner in Germany for Magnetic Field Cancelling systems]
