Turnkey system for any SEM
- 3D calibration standard
- Backscattered electron detector
- Multi-channel signal amplifier
- Scan generator and image acquisition
- Live surface topography software
One step calibration software with dedicated m2c standards
- Calibration of scale in all three spatial directions (X, Y and Z)
- Measurement of orthogonality of all axes (shearing)
- Analysis of nonlinear deviations
Multi-segment solid-state backscattered electron (BSE) detectors
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Monolithic or hybrid quadrant sensors for high resolution
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Optional light blind sensors for high temperature/in situ SEM
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In situ pre-amplification for minimum noise and maximum speed
Manual insertion/retraction mechanism (optional)
- Manual XYZ alignment under vacuum conditions
- Fully retractable when not in use
- Compatible with a wide range of SEMs and FIB-SEMs
Advanced signal amplifier for simultaneous data acquisition
- Channel independent brightness and contrast controls
- Hardware mixed output for simultaneous acquisition with SE, BSE, EBIC, CL, or EDS
- USB controlled and fully integrated with the acquisition software
The most powerful and versatile SEM scanning system
- Integrated scan generator and image acquisition
- Very large image resolution, up to 16k x 16k pixels
- Very fast scanning speed, down to 200ns dwell time
- Simultaneous 4x analogue and 12x digital counter inputs
Completely integrated control and acquisition
- Live surface height reconstruction from BSE signals
- Built-in 3D surface visualisation tool
- Configurable workflows with integrated SE and BSE scan profiles
Reconstructed height is quantitative
- Surface normals are calculated from 4x BSE gradients at each beam position
- Complete surface topography is assembled from all surface normals
- Height resolution depends primarily on beam/sample interaction volume
Live 3D visualisation tool
- Pan, rotate, tilt, zoom and scale Z
- Enhance with shadows and custom colour coding
- Export to standard binary AL3D and plain text SDF formats