Modernization of a ZEISS LEO 1550 for the Institut für Halbleitertechnik der Universität Stuttgart (IHT), the Institute of Semiconductor Engineering at Universität Stuttgart.

Our team installed a point electronic SEM Modernization, together with a new Quantax Compact EDS system from Bruker with an XFlash detector. Existing detectors and the chamber camera were seamlessly integrated in the modernized SEM.

Following the official End-of-Service announcement of the microscope, the availability of spare parts and manufacturer support became increasingly challenging. In search of a solution, Prof. Dr. Alwin Daus, Head of IHT, and Dr. Daniel Schwarz, as the Cleanroom Manager responsible for the SEM, opted for the modernization.

The SEM Modernization replaced the legacy electronics with high-performance hardware and software from point electronic, restoring full serviceability. The modernization was combined with the acquisition of a new EDX system, delivered as a complete package through point electronic GmbH electronic as an official Bruker Corporation partner.

Uninstallation, installation, and training were completed within a few days. “The modernization went very smoothly,” says Dr. Schwarz, adding that the SEM now delivers high-quality images.

The SEM is primarily used to analyze semiconductor devices such as diodes, transistors, photodetectors, and two-dimensional materials produced in the institute’s cleanroom.

We thank Prof. Dr. Alwin Daus, Dr. Daniel Schwarz and the entire IHT team and wish them continued success with the modernized SEM.