SampleNav

SampleNav - software for sample navigation in SEM

SampleNav is a software for automated sample positioning in the scanning electron microscope (SEM). Users can move to saved sample positions and add new positions.

The necessary registration of the sample stage or the sample is supported by moving to defined markings. These can be applied in advance or selected from easily recognizable structures such as the corner points of a carrier (chip).

The sample positions are saved in a project file, which enables exchange between different SEMs and with third-party systems such as light microscopes with motorized sample stages. Once saved, positions can be approached automatically across all devices.

Set, save and load sample positions in SEM

Navigate to identical sample positions in different microscopes

Save and recall defined sample positions at later time

Store and reload all data in project files for further use

Maintain flexibility with our manufacturer independent approach

Use sample stages from all major SEM and FIB-SEM manufacturers

Register any holder or sample coordinate-based with two or more reference points

Sample navigation and stage orientation with a few clicks

• Suitable for all holders with at least two reference marks
• Applicable also with reproduceable measurable sample features
• Recommended use with four reference marks for accuracy estimation with statistical methods
• Affine approach allows for scale and shearing deviations between different microscopes
• SampleNav app for Windows 7-11
• Interface to stage control of all major SEM and FIB-SEM manufacturers with EMGateway
• Additional interfaces to further stage controls on request
• Project file contains reference information as well as all sample positions and areas (XML)
• File interface compatible with IMS software by Imagic

Cross-microscope navigation of sample positions

• Sample navigation and stage orientation with a few clicks

  

• Cross-microscope navigation of sample positions