Successful Modernization of a ZEISS LEO1560 Electron Microscope for NaMLab, a research institution and a wholly owned subsidiary and affiliated institute of Dresden University of Technology.

NaMLab focuses on integrating and applying its material expertise in ferroelectric devices, reconfigurable nanowire transistors, and energy efficient GaN devices.

“We decided to modernize in order to give our SEM a second life, as its performance was still very good but spare part support from the manufacturer has ended. Sustainability and cost efficiency were key factors in our decision," says Jan Gärtner, responsible for the field of cleanroom and process at NaMLab.

Our point electronic GmbH team installed the SEM Modernization and a point electronic Topography System with BSE detector and 3D Calibration Structure. The Topography System enables live quantitative and calibrated measurement of surface height, with live 3D visualization.

“We use the SEM to visualize manufactured layers, lithographic patterns and complete devices, perform elemental analysis and phase analysis.

The modernization process itself worked well and was perfectly organized by the team of point electronic especially with the great effort of Mr. Graul and Mr. Reeske.”

We thank the NaMLab team and wish them successful scientific exploration and discovery with the modernized SEM.