SEM Modernization of a LEO 1560 for the Institut für Mikroelektronik Stuttgart IMS
Questions to Bernd Leibold, Institut für Mikroelektronik Stuttgart IMS
Can you tell us about your institution?
At the Institut für Mikroelektronik Stuttgart IMS, we research and produce innovative applications for microelectronics and nanotechnology. As part of the Baden-Württemberg Innovation Alliance, we stand for technology transfer to industry. We combine university research and industrial application with reliable small series production.
What were your reasons for modernizing?
The LEO 1560 has been with us since the end of 2001 and has served us very well so far. At the beginning of 2023, we received notification from the manufacturer that the device would be discontinued on October 1, 2023. As the LEO 1560 is a workhorse for us, we were looking for a way to operate the device for longer reliably, without the risk of total failure. This was achieved through modernization (replacement of hardware and software) by point electronic.
Which applications do you use with the modernized microscope?
We mainly analyze samples from semiconductor production. These are mostly wafer fragments with silicon as the base material with a wide variety of structures. The modernization will not change the range of applications.
Do you have experience with other point electronic systems or services?
point electronic helped us when the SEM's high-voltage power supply unit failed. The part was no longer available from the manufacturer and point electronic was able to supply us with an HV power supply unit from their stock. Initially on loan for testing. After a successful test, the power supply unit was purchased.
How is working with the microscope modernized by point electronic?
It can be a little difficult to get used to the point electronic software at first if you have already been working with the manufacturer's software for several years. But after a while you get to grips with it. There are new features that are very useful.
What are your experiences with the installation of the modernization by point electronic?
The modernization was carried out conscientiously and quickly under clean room conditions. At the end there was little time left to learn the software. However, this was caught up on several team viewer sessions.
About Bernd Leibold, Institut für Mikroelektronik Stuttgart
Bernd Leibold is a chemical/process engineer and research associate in the field of etching processes at IMS Stuttgart.