Synchronized multi-channel multi-technique characterization - live in SEM
Our topography system enables live, direct correlation of multiple signals of analog and digital detectors and to synchronize multiple systems over digital trigger and synchronization signals.
SEM relies on various material characterization techniques. Microscopes generally provide detectors for the common imaging techniques, such as Secondary Electron (SE) or Back-Scattered Electrons (BSE), and third-party add-on systems, such as Energy Dispersive X-ray spectroscopy (EDS) or Electron Beam Induced Current (EBIC).
Whilst add-on systems generally include synchronized characterization with standard detectors, synchronized imaging of all equipment required for correlative characterization remains challenging.
point electronic's DISS6 scan controller acquires up to 20 analog and 14 digital signals simultaneously, enabling live, direct correlation of multiple signals of analog and digital detectors such as BSE (BackScattered Electrons) and SE (Secondary Electrons) and, crucially, to synchronize multiple systems over digital trigger and synchronization signals.
Our live software tools include signal grayscale and color mixing, pixel value quantification and topographic surface reconstruction. This enables live, direct correlation between the different detectors.
For correlative characterization, all data is saved in one file to aid data visualization, extraction and processing.
The setup:
with dedicated live software:
- easy selection of signals
- live mixing of signals
- live signal processing
What you need, and why
Applying different analysis techniques in material characterization allows a profound analysis correlation of different properties.
With synchronized multi-channel multi-technique signal acquisition a direct and accurate correlative material characterization is achieved.
DISS6 SEM scan controller allows simultaneous signal acquisition of up to 20 analog signals and 12 digital counters and, crucially if no signal output is provided by a detector system, to synchronize multiple systems over digital trigger and clocks.
Its software with live signal processing and mixing enables a direct correlation of e.g. topographic, chemical and electrical properties.
The imaging results: Simultaneous multi-channel multi-technique imaging in SEM
- BSE for material contrast and Quantitative 3D Reconstruction enable Correlation of topography and material analysis for 3D Topography
- SE + EBIC and Quantitative 3D Reconstruction enable Correlation of topography and electrical analysis for 3D Electrical Analysis
Data overview of the DISS6 SEM scan controller:
- 8 analog 12 bit inputs for processed detector signals (SE, Inlens, CL, BF, ADF)
- 1 analog 20 bit input for LockIn experiments
- 16 analog inputs for raw signals of diode based detectors (4Q BSE, STEM)
- 14 digital inputs for counting
- Analog scan output for direct scan control via external scan interface
Synchronization in and outputs:
- Pixel, Line, Frame Clock
- Pixel, Line, Frame Trigger
- Digital LockIn amplifier