EA Amplifier for SEM

EA Amplifier - calibrated high-speed electronics

The EA Amplifier from point electronic GmbH is a complex multi-stage amplification system with integrated current and voltage sources for Electrical Analysis.

It features a high-speed transimpedance preamplifier for imaging, a bandwidth filter and a flexible second-stage amplifier for imaging.

High-precision voltage and current sources are integrated into the compact housing, as required for biasing, IV sweeps and compensation.

Packaging is miniaturised in order to reduce cable lengths, increase speed and optimise signal-to-noise ratio.

• fully calibrated electronics for quantitative technique
• ex-situ preamplifier for junctions and Schottky barriers
• integrated lock-in amplification with scan-mode assisted beam blanking
• built-in voltage bias and current compensation

The EA Amplifer is part of the EA for SEM system and is designed for a wide range of Electrical Analysis techniques.

Features (standard):

• High-speed and low-noise ex-situ preamplifier with adjustable gain
• Automatic routing, to ground, bias or beam current meter
• Lowpass filter to match amplification with imaging speed
• Second-stage amplifier for fine image adjustments
• Voltage source for device biasing
• Current source to compensate for forward or reverse signals
• Auto-zero function for calibration

Features (optional):

• In-situ preamplifier for low impedance samples (with the Premium EA sample holder)
• Automatic current - voltage sweeps for device characterisation

Electrical Analysis techniques:

Electron Beam Induced Current (EBIC)

• map internal electric fields in semiconductors and ceramics
• characterise electrical activity of defects
• localise material and/or processing defects

make

Resistance Contrast Imaging (EBAC/RCI)

• localise open and shorts in inteconnects
• identify weaknesses in oxide layers
• map resistance with high spatial resolution

explore

Electron Beam Induced Current Change (EBIRCh)

• localise defects in transistors with high-spatial resolution
• pin-point leackages/weknesses in oxides
• similar with Optical Beam Induced Resistance change (OBIRCh)

discover

• EA amplifier - front

  

• EA amplifier - back

  

• In-situ preamplifier

  

• In-situ preamplifier frontdetail