CAM Workshop 2026

May 20, 2026 - May 21, 2026

About the Workshop:

CAM-Workshop brings together experts from the electronics industry and from material diagnostics equipment manufacturers in order to discuss challenges, novel solutions and future needs in failure analysis and material characterization of electronic devices, sensors and systems.

We share booth with our partner Imina Technologies S.A. Imina is a Swiss manufacturer of robotic solutions for the characterization of samples under optical microscopes (OM), FA inspection tools, Probe Stations and scanning electron microscopes (SEM/FIB). Imina is one of the leaders in the semiconductor test equipment market for micro & nanoprobing and electrical failure analysis.

point electronic's topics on site:

Your contact on site:

René Hammer

Don't miss our presentations.

Ultra-Low pA-level noise EBIC and RCI of high impedance samples

Wednesday, May 20, 2026
11:00 AM (Europe/Berlin)

Nanoprobing imaging equipment for Electron Beam Absorbed Current/Resistive Contrast Imaging (EBAC/RCI) and Electron Beam Induced Current (EBIC) is widely used in semiconductor process control and development. As device dimensions shrink, electron beam damage becomes more critical, requiring lower beam voltages and currents. However, lower beam currents reduce nanoprobing imaging signals and signal-to-noise ratio. This talk presents a novel pA low-noise level amplifier for RCI and EBIC measurements on high-impedance samples, achieving a peak-to-peak noise level of 3 pA. Its performance is experimentally compared with a reference amplifier, highlighting improved RCI measurement capabilities and new operational limits.

René Hammer
Product Manager / Scientist

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