Workshop: Failure Analysis with Nanoprobing, EBIC and EBAC

Sep 23, 2016

  • Fraunhofer CAM
  • Halle (Saale), Germany

A range of investigation cases will be discussed with the inputs of experts in both domains. The event will end with a hands-on analysis at Fraunhofer's lab.


The workshop will take place on Friday, 23.09.2016 at Fraunhofer CAM, Heideallee 19, Halle.

  • 09.00-12.00 Presentations
  • 12.00-13.00 Lunch
  • 13.00-15.00 Tool Demos


  • Microprobing to Nanoprobing workflow in FA using versatile probing platforms
    (Guillaume Boetsch, Imina Technologies SA)
  • Quantitative EBIC and EBAC/RCI techniques
    ​(Dr. Grigore Moldovan, point electronic GmbH)
  • Applications of nano-probing and SEM based current imaging for IC failure analysis
    ​(Jörg Jatzkowski, Fraunhofer CAM)


Participation is free of charge, but participants need to register before September 14th, 2016 via email to